刘军,项晨,陈田,等.一种基于分压电路的绑定后TSV测试方法[J]. 微电子学与计算机,2024,41(4):132-140. doi: 10.19304/J.ISSN1000-7180.2023.0205
引用本文: 刘军,项晨,陈田,等.一种基于分压电路的绑定后TSV测试方法[J]. 微电子学与计算机,2024,41(4):132-140. doi: 10.19304/J.ISSN1000-7180.2023.0205
LIU J,XIANG C,CHEN T,et al. A post-bond TSV test method based on voltage division[J]. Microelectronics & Computer,2024,41(4):132-140. doi: 10.19304/J.ISSN1000-7180.2023.0205
Citation: LIU J,XIANG C,CHEN T,et al. A post-bond TSV test method based on voltage division[J]. Microelectronics & Computer,2024,41(4):132-140. doi: 10.19304/J.ISSN1000-7180.2023.0205

一种基于分压电路的绑定后TSV测试方法

A post-bond TSV test method based on voltage division

  • 摘要: 对硅通孔(Through Silicon Via, TSV)进行绑定后测试可以有效地提升三维集成电路的性能和良率。现有的测试方法虽然对于开路和桥接故障的测试能力较高,但是对于泄漏故障的测试效果较差,并且所需的总测试时间较长。对此,提出了一种基于分压电路的TSV绑定后测试方法。该方法设计了一种分压电路,进行泄漏故障测试时可以形成一条无分支的电流路径,有效提高了对泄漏故障的测试能力。此外,该方法测试开路故障和泄漏故障时的电流路径不会相互干扰,可以同时测试相邻TSV的开路故障和泄漏故障。实验结果表明,该方法可以测试10 kΩ以下的弱泄漏故障,并且在工艺偏差下依然能够保持较高的测试能力。相比同类测试方法,该方法所需面积开销更小,所需总测试时间更少。

     

    Abstract: Post-bond Through Silicon Via (TSV) test can effectively improve the performance and yield of 3D ICs. Although existing test methods have high test capabilities for open and bridge faults, their effectiveness for testing leakage faults is poor, and the total test time is long. To address this issue, a post-bond TSV test method based on the voltage divider circuit is proposed. This proposed method designs a voltage divider circuit that can form an uninterrupted current path during leakage fault testing, effectively improving the test capabilities for leakage faults. In addition, the current paths of testing open and leakage faults do not interfere with each other, so this method can test open and leakage faults of adjacent TSVs simultaneously. Experimental results demonstrate that this proposed method can test weak leakage faults below 10 kΩ and maintain high test capabilities even under process variations. Compared to similar test methods, this method has a smaller area overhead and less total test time.

     

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